Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

Novel Fabrication Method for Surface Micromachined Thin Single-Crystal Silicon Cantilever Beams

This paper describes a novel technique for the fabrication of surface micromachined thin silicon cantilever beams using merged epitaxial lateral overgrowth (MELO) of silicon and chemical–mechanical polishing (CMP). The objective is to demonstrate the feasibility of using this novel technique for the fabrication of arrays of ultrathin, low-stress, single-crystal silicon cantilever beams for use ...

Design, fabrication, and characterization of surface micromachined MEMS cantilever components

Microelectromechanical System (MEMS) and microfabrication have experienced phenomenal growth over the past few years, and have had tremendous impact on and have also led to major breakthroughs in information technology, computers, medicine, health, manufacturing, transportation, energy, avionics, security, etc. Development of MEMS is multiphysics in nature and is based upon fundamental theory, ...

High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams.

We report on a technique for making high-throughput residual stress measurements on thin films by means of micromachined cantilever beams and an array of parallel laser beams. In this technique, the film of interest is deposited onto a silicon substrate with micromachined cantilever beams. The residual stress in the film causes the beams to bend. The curvature of the beams, which is proportiona...

Characterization of vaccinia virus particles using microscale silicon cantilever resonators and atomic force microscopy

Rapid means of characterizing and detecting virus particles are very important for a wide variety of applications. We have used vaccinia virus, a member of the Poxviridae virus family and the basis of the smallpox vaccine, as the test case and characterized these particles using atomic force microscopy and micron-scale cantilever beams, with the long-term goal of developing devices for the dire...